hi winThree moving HIWIN axes with spindle drive are used here for wafer centring and angular alnment. Depending on the alner model, an X-Y unit or an X-Z unit is used. Due toDružbo vodi in upravlja korporacija Hiwin Technologies Corp. Generalni direktor: Chuang Pao Yang Poslovni register: Monza in Brianza Št. vpisa v poslovni register 1901443 ID št. za DDV: 08198930961. HIWIN Srl a socio unico